PORTLAND, Ore. — A German company is fielding modeling tools that can help chip makers assess the promise of immersion lithography. Putting a layer of water between a wafer and the stepper lens could ...

Lithography tools account for a significant portion of chipmakers' capital expenditures, with EUV platforms exceeding $150 million in price. ASML's immersion lithography tools allowed the company to ...

San Francisco — Immersion scanners and other tools aimed at 45-nanometer lithography took a bow at Semicon West here last week. But despite the industry's optimism that particular tools are now ready ...

OYAMA, Japan--(BUSINESS WIRE)--Gigaphoton, Inc. , a major lithography light source manufacturer, announced that the company will begin shipping the GT63A, the next-generation ArF excimer laser for ...

As the US rallies Japan and the Netherlands to tighten up semiconductor export controls against China, the world has been trying to estimate the extent of damage done to the Chinese semiconductor ...

Taiwan Semiconductor Manufacturing Co. (TSMC) has nearly finished perfecting a new chip making technique designed to extend the life of current factory equipment even as it builds ever more intricate ...

M. K. Sears, J. Bekaert, B. W. Smith, "Pupil wavefront manipulation for optical nanolithography", Proc. SPIE 8326, (2012) paper M. K. Sears, G. Fenger, J. Mailfert, B ...

The 45-nanometer process is right on time, according to Intel. The Santa Clara, Calif.-based chip giant has created test chips made on the 45-nanometer process and will likely begin shipping ...

The Netherlands and Japan reportedly have struck a deal with the US to jointly restrict exports of chipmaking tools to China, which will further cripple the development of China's semiconductor ...

Experts at the Table: Semiconductor Engineering sat down to discuss the current state and future direction of mask-making, with Harry Levinson, principal lithographer at HJL Lithography; Aki Fujimura, ...