Nikon Corp. of Tokyo, Japan, intends to accelerate its electron projection lithography (EPL) development program after determining that IC manufacturers will need the production tools for fabrication ...

MONTEREY, Calif. — Hoping to take a lead in the next-generation lithography (NGL) race, Japan's Nikon Corp. today announced what appears to be the world's first photomask blank for exposure tools ...

(Nanowerk News) Integrated optical signal distributing, processing, and sensing networks require the miniaturization of basic optical elements, such as waveguides, splitters, gratings, and optical ...

Metalenses have been used to image microscopic features of tissue and resolve details smaller than a wavelength of light. Now, Harvard researchers have turned the metalens towards space. Researchers ...

Fig. 1 The lithography process. The projection lithography system. The advancement of semiconductor manufacturing is a key driver of electronic device innovations. As Moore’s Law progresses, ...

The next generation of silicon chips with feature sizes of 0.13 µm will be manufactured in bulk using optics that operate at 193 nm. Equipment makers are currently shipping the systems that can build ...

Florian Zangerl, CEO and Christof Hieger, CTO of IN-VISION (credit: Thomas Topf) Optics-Specialist IN-VISION announces the all-new PANDIA Light Engine, designed for dynamic exposure with multiple ...

The Texas Instruments DLP Pico Projector Development Kit and chipset has already attracted massive interest at trade shows in the US and Europe this year. Jacqueline Hewett asks Arun Chhabra of TI to ...

Computational lithography and mask optimization techniques are at the forefront of enabling the semiconductor industry's continued miniaturisation of integrated circuits. This field encompasses ...

Integrated optical signal distributing, processing, and sensing networks require the miniaturization of basic optical elements, such as waveguides, splitters, gratings, and optical switches. To ...

Researchers review AI-powered inverse lithography, showing how deep learning boosts chip patterning precision and efficiency while facing scaling challenges. Computational lithography optimizes the ...