Over the last 20 years, the proliferation of research utilizing scanning electron microscopy (SEM) has driven the performance of systems towards higher resolution at lower voltages. This enthusiasm is ...

Carl Zeiss SMT has launched a new SEM (scanning electron microscope), as well as upgrades to existing electron microscopes and an argon ion beam column for its NVision 40 CrossBeam nanoscale ...

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Extending the analytical capabilities of its Sigma line of FE-SEMs (field-emission scanning electron microscopes), Carl Zeiss SMT has incorporated variable-pressure technology to improve imaging and ...

If a charged particle beam interacts with structures of different electric conductivity in a microelectronic circuit, this leads to local changes in the electric potential at its surface. In a ...